Data processing: generic control systems or specific application – Specific application – apparatus or process – Electrical power generation or distribution system
Reexamination Certificate
2007-11-29
2010-12-14
Masinick, Michael D (Department: 2128)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Electrical power generation or distribution system
C250S424000, C315S111810, C315S111910
Reexamination Certificate
active
07853364
ABSTRACT:
An ion source, often used for materials processing applications in a vacuum processing chamber, is provided with an adaptive control system. The adaptive control system has a microprocessor and memory that regulate the inputs of power and gas flow into the ion source. The adaptive control system monitors and stores the dynamic input impedance properties and status of input devices to the ion source. The adaptive control system may additionally control magnetic fields within the ion source. The adaptive control system provides a multivariable control for driving any combination of input power, gas flow, magnetic field, or electrostatic ion beam extraction or acceleration field into the ion source.
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Burtner David M.
Deakins James D.
Erguder Tolga
Hansen Dennis J.
Mahoney Leonard J.
Hensley Kim & Holzer LLC
Masinick Michael D
Veeco Instruments Inc.
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