Actuator using organic film membrane and manufacturing...

Details Actuator using organic film membrane and manufacturing... Actuator using organic film membrane and manufacturing...

2006-05-09

2006-05-09

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000

Reexamination Certificate

active

07042137

ABSTRACT:
An actuator using an organic film membrane is provided and includes a substrate having a cavity with a bottom portion at a predetermined depth in the upper center, an organic film membrane attached on the upper surface of the substrate to close the upper portion of the cavity, and a driving electrode arranged on the organic film membrane. The driving electrode is driven by a piezoelectricity force or an electrostatic force. The membrane of the actuator can be easily fabricated, and the size of the actuator can be reduced while improving a yield.

REFERENCES:
patent: 3752941 (1973-08-01), Massa et al.
patent: 5286975 (1994-02-01), Ogura et al.
patent: 5453628 (1995-09-01), Hartsell et al.
patent: 5789845 (1998-08-01), Wadaka et al.
patent: 10-209794 (1998-08-01), None
patent: 2001-102902 (2001-04-01), None
patent: 2001-0045309 (2001-06-01), None

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