Actuator system for nanoscale movement

Details Actuator system for nanoscale movement Actuator system for nanoscale movement

2008-07-01

2008-07-01

Underwood, Donald (Department: 3652)

Material or article handling

Load carried along a horizontal linear path

C074S490090, C359S393000

Reexamination Certificate

active

10852501

ABSTRACT:
An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.

REFERENCES:
patent: 5638206 (1997-06-01), Sumiya et al.
patent: 6327929 (2001-12-01), Yanagisawa

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