Actuator assembly and lithographic apparatus comprising such...

Details Actuator assembly and lithographic apparatus comprising such... Actuator assembly and lithographic apparatus comprising such...

2007-01-23

2007-01-23

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

10967306

ABSTRACT:
An actuator assembly includes a coil moveably positionable in a magnetic field generated by a magnet assembly, each of the coil and the magnet having substantially only one side facing the other. A magnetized field-shaping element is provided for shaping the magnetic field such that the magnetic field is substantially perpendicular to the direction of the electrical current for generating a force in a first degree of freedom. Thus, the coil may easily be mounted, since it does not need to be enclosed by magnet poles.

REFERENCES:
patent: 5719451 (1998-02-01), Cook et al.
patent: 6445093 (2002-09-01), Binnard
patent: 6717296 (2004-04-01), Hol et al.
patent: 6906789 (2005-06-01), Carter et al.
patent: 2002/0000904 (2002-01-01), Compter et al.

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