Actuator and table device

Horizontally supported planar surfaces – Power driven

Reexamination Certificate

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Reexamination Certificate

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07451710

ABSTRACT:
In order to achieve miniaturization and high accuracy in movement, an actuator comprises a stationary shaft extending in a predetermined direction, a needle movable along the stationary shaft, one of the stationary shaft and the needle having a permanent magnet, and the other of the stationary shaft and the needle comprising a linear motor having a coil, a guide rail extending in parallel to the stationary shaft and interposing the needle inside to guide the same, and a pair of support means interposed between the guide rail and the needle to movably support the needle, points of action of the pair of support means and an axis of the stationary shaft being consistent with each other.

REFERENCES:
patent: 4423686 (1984-01-01), Ueno et al.
patent: 4653408 (1987-03-01), Nagashima et al.
patent: 5251501 (1993-10-01), Katahira
patent: 5586468 (1996-12-01), Tomotaki
patent: 5613403 (1997-03-01), Takei
patent: 5676016 (1997-10-01), Nagai et al.
patent: 5724893 (1998-03-01), Lee et al.
patent: 6157159 (2000-12-01), Korenaga et al.
patent: 6244192 (2001-06-01), Suzuki et al.
patent: 07170710 (1995-07-01), None
patent: 2002291220 (2002-10-01), None
patent: 2003121573 (2003-04-01), None

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