Automated creation of metrology recipes

Details Automated creation of metrology recipes Automated creation of metrology recipes

2002-11-21

2008-11-25

Rodriguez, Paul L (Department: 2123)

Data processing: structural design, modeling, simulation, and em

Simulating electronic device or electrical system

C716S030000, C716S030000, C438S007000, C438S014000, C700S121000

Reexamination Certificate

active

07457736

ABSTRACT:
An automated metrology recipe set up process is described for a manufacturing process, in which patterns to be formed on a device are defined using a design database. The design database is processed to produce a simulated image of a feature for use in a metrology tool for a measurement of the feature. The simulated image is supplied to the metrology tool, where it is used as a basis for alignment of the tool for the measurement. Other recipe data is combined with the simulated image to provide a fully automated metrology set up process.

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Jason Groce, Advanced Process Control Framework Initiative (APCFI) Project: Overview, SeMatech International Jun. 30, 1999 consisting of 25 pages.

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