Actuation circuit for MEMS structures

Details Actuation circuit for MEMS structures Actuation circuit for MEMS structures

2007-06-05

2007-06-05

Chang, Daniel (Department: 2819)

Electronic digital logic circuitry

Miscellaneous

C326S083000, C327S112000

Reexamination Certificate

active

10738375

ABSTRACT:
An actuation circuit which actuates force electrodes using an open loop transconductance stage. The actuation circuit includes at least a first output and a second output, and a first input. The circuit includes a current sink coupled to the first output which is enabled when a current is applied to said first input. The circuit also includes a decision switch which is coupled to the current sink and which enables a current path from the first input to the second output when a voltage present at said first output reaches a predetermined minimum level.

REFERENCES:
patent: 4247791 (1981-01-01), Rovell
patent: 5859548 (1999-01-01), Kong
patent: 6700719 (2004-03-01), Iroaga et al.
patent: 2002/0191315 (2002-12-01), Iroaga et al.

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