Coherent light generators – Particular component circuitry – Having feedback circuitry
Reexamination Certificate
2006-08-25
2010-12-14
Harvey, Minsun (Department: 2828)
Coherent light generators
Particular component circuitry
Having feedback circuitry
C372S029020, C372S038070, C372S055000, C372S057000, C372S102000
Reexamination Certificate
active
07852889
ABSTRACT:
According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
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Dunstan Wayne J.
Jacques Robert N.
Rao Rajasekhar M.
Trintchouk Fedor B.
Carter Michael
Cymer Inc.
Harvey Minsun
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