4. Coherent light generators
  5. Particular beam control device
  6. Having particular beam control circuit component

Fedor B. Trintchouk

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Active spectral control of DUV light source

Coherent light generators – Particular component circuitry – Having feedback circuitry
Reexamination Certificate

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Gas discharge laser output light beam parameter control

Coherent light generators – Particular beam control device – Having particular beam control circuit component
Reexamination Certificate

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Multi-chambered excimer or molecular fluorine gas discharge...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3169115

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