Active scan velocity control for torsional hinged MEMS scanner

Details Active scan velocity control for torsional hinged MEMS scanner Active scan velocity control for torsional hinged MEMS scanner

2006-09-19

2006-09-19

Williams, Hezron (Department: 2856)

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

C073S649000, C073S657000

Reexamination Certificate

active

07107848

ABSTRACT:
System and method for adjusting an operational parameter of a component that drifts with temperature changes. The system includes a torsional hinged device that oscillates at a resonant frequency, and the resonant frequency of the device drifts or varies with temperature. Differences of a selected parameter between a drive signal and the actual selected parameter are monitored to determine changes in the resonant frequency. An output signal representative of change in the resonant frequency is used to adjust another component that also has a parameter that varies with temperature changes. The adjustment compensates for the temperature drift.

REFERENCES:
patent: 6624549 (2003-09-01), Takeuchi et al.
patent: 6687132 (2004-02-01), Orcutt et al.
patent: 6900918 (2005-05-01), Orcutt et al.
patent: 6931698 (2005-08-01), Takeuchi et al.
patent: 6965177 (2005-11-01), Turner et al.

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