Active resistor trimming by differential annealing

Details Active resistor trimming by differential annealing Active resistor trimming by differential annealing

1991-07-01

1993-08-03

Lateef, Marvin M.

Electrical resistors

Mechanically variable

Resistance value varied by removing or adding material

338308, 338309, 296101, 156643, 1566591, H01C 1010

Patent

active

052333272

ABSTRACT:
A process of fabricating an electrical resistor and a product produced thereby in which trimming of a resistive element of a material exhibiting thermosetting properties is accomplished by in-situ annealing of one or more regions across the width of the resistive element to certain predetermined temperatures, thereby altering the crystal properties and the sheet resistance within those regions. Annealing is preferably done by laser radiation at levels below that at which any cutting or ablation of the resistive element will occur, thus avoiding defects in the resistor or associated circuits. By controlling laser radiation and the annealing process, virtually any desired trim slope may be obtained, resulting in improved trimming accuracy. Efficiency of the process is enhanced by annealing the resistive element to obtain compound trim slopes corresponding to coarse and fine trimming of the resistive element.

REFERENCES:
patent: 4392992 (1983-07-01), Paulson et al.
patent: 4703557 (1987-11-01), Nespor et al.

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