Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2005-09-13
2005-09-13
Niebling, John F. (Department: 2812)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S062000, C438S907000
Reexamination Certificate
active
06943066
ABSTRACT:
An electronic device is formed from electronic elements deposited on a substrate. The electronic elements are deposited on the substrate by advancing the substrate through a plurality of deposition vacuum vessels, with each deposition vacuum vessel having at least one material deposition source and a shadowmask positioned therein. The material from at least one material deposition source positioned in each deposition vacuum vessel is deposited on the substrate through the shadowmask positioned in the deposition vacuum vessel to form on the substrate a circuit comprised of an array of electronic elements. The circuit is formed solely by the successive deposition of materials on the substrate.
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Brody Thomas P.
Malmberg Paul R.
Stapleton David J.
Advantech Global, LTD
Kennedy Jennifer M.
Niebling John F.
Webb Ziesenheim & Logsdon Orkin & Hanson, P.C.
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