Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-08-07
2007-08-07
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C073S105000
Reexamination Certificate
active
11087874
ABSTRACT:
A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, an interference structure is provided to limit the range of deflection of the probe.
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