Acrylic copolymer and radiation-sensitive resin composition

Details Acrylic copolymer and radiation-sensitive resin composition Acrylic copolymer and radiation-sensitive resin composition

2003-11-04

2008-11-18

Walke, Amanda C. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C526S282000

Reexamination Certificate

active

07452655

ABSTRACT:
An acrylic copolymer having a specific structure and a radiation-sensitive resin composition comprising the acrylic copolymer having high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape, and, in particular, excelling in forming contact holes and lines-and-spaces.

REFERENCES:
patent: 6403280 (2002-06-01), Yamahara et al.
patent: 6482568 (2002-11-01), Douki et al.
patent: 6800419 (2004-10-01), Soyano et al.
patent: 6933094 (2005-08-01), Miyaji et al.
patent: 7179578 (2007-02-01), Sato et al.
patent: 2003/0054286 (2003-03-01), Sato et al.
patent: 2003/0203309 (2003-10-01), Nishimura et al.
patent: 2004/0048192 (2004-03-01), Shima et al.
patent: 2004/0146802 (2004-07-01), Yamamoto et al.
patent: 2005/0214680 (2005-09-01), Miyaji et al.
patent: 1353225 (2003-10-01), None
patent: 1500977 (2005-01-01), None
patent: 05-188598 (1993-07-01), None
patent: 06-012452 (1994-01-01), None
patent: 09-073173 (1997-03-01), None
patent: 2000-026446 (2000-01-01), None
patent: 2002-145955 (2002-05-01), None
patent: 2002-156750 (2002-05-01), None
patent: 2002-201232 (2002-07-01), None
patent: 2002-251013 (2002-09-01), None
patent: 2002-303978 (2002-10-01), None
patent: 2002-372784 (2002-12-01), None
patent: 2003-043690 (2003-02-01), None
patent: 2003-206315 (2003-07-01), None
U.S. Appl. No. 10/533,223, filed Apr. 29, 2005, Nishimura et al.

Affiliated with

Also associated with

Rating

Acrylic copolymer and radiation-sensitive resin composition does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acrylic copolymer and radiation-sensitive resin composition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acrylic copolymer and radiation-sensitive resin composition will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4020510