Acoustic wave enhanced developer

Details Acoustic wave enhanced developer Acoustic wave enhanced developer

1996-12-23

1999-03-02

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Use of sound or nondigital compressive force

430311, 430322, 430328, G03F 726

Patent

active

058768750

ABSTRACT:
A method and an apparatus are disclosed for enhancing the solution diffusibility of a developing liquid in a semiconductor wafer developing unit through the agitation of the liquid by acoustic power. Two embodiments are described using sonic and ultrasonic waves. In the first embodiment, a sonic wave couples into the developing liquid, agitating it and thereby enhancing its solution diffusibility. In the second embodiment, an ultrasonic wave couples into the semiconductor wafer, causing the photoresist pattern to vibrate, again enhancing the solution diffusibility of the developing liquid.

REFERENCES:
patent: 4612267 (1986-09-01), Heitmann et al.
patent: 5395803 (1995-03-01), Adams
patent: 5454871 (1995-10-01), Liaw et al.
patent: 5650251 (1997-07-01), Ishiwata

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