Acoustic wave device, resonator and filter

Details Acoustic wave device, resonator and filter Acoustic wave device, resonator and filter

2007-09-12

2009-08-11

SanMartin, Jaydi (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C333S187000

Reexamination Certificate

active

07573178

ABSTRACT:
An acoustic wave device includes a piezoelectric substrate, comb electrodes formed above the piezoelectric substrate, and a first dielectric film provided so as to cover the comb electrodes, the first dielectric film having empty spaces associated with fingers of the comb electrodes.

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Masatsune Yamaguchi, Takashi Yamashita, Ken-Ya Hashimoto and Tatsuya Omori, “HighlyPiezoelectric Boundary Waves in Si/SiO2/LiNbO2Structure,” Proceeding of 1998 IEEE International Frequency Control Symposium, U.S.A., IEEE, 1998, pp. 484-488.

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