Measuring and testing – Gas analysis – By vibration
Patent
1994-12-20
1996-11-05
Williams, Hezron E.
Measuring and testing
Gas analysis
By vibration
73 2406, 73 3105, 310313R, G01N 2902, H01L 4104, H01L 4118
Patent
active
055719449
ABSTRACT:
Moisture corrosive gas stream is measured as a function of the difference in resonant frequencies between two acoustic wave (AW) devices, each with a film which accepts at least one of the components of the gas stream. One AW is located in the gas stream while the other is located outside the gas stream but in the same thermal environment. In one embodiment, the film is a hydrophilic material such as SiO.sub.2. In another embodiment, the SiO.sub.2 is covered with another film which is impermeable to the corrosive gas, such that the AW device in the gas stream measures only the water vapor. In yet another embodiment, the film comprises polyethylene oxide which is hydrophobic and measures only the partial pressure of the corrosive gas. Other embodiments allow for compensation of drift in the system.
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Frye Gregory C.
Pfeifer Kent B.
Schneider Thomas W.
Cone Gregory A.
Hohimer John P.
Larkin Daniel S.
Sandia Corporation
Williams Hezron E.
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