Communications – electrical: acoustic wave systems and devices – Signal transducers – Receivers
Patent
1989-12-04
1992-09-08
Eldred, J. W.
Communications, electrical: acoustic wave systems and devices
Signal transducers
Receivers
381174, 381191, 29 2942, H04R 1900
Patent
active
051464357
ABSTRACT:
An acoustic transducer includes a perforated capacitor plate; a movable capacitor plate spaced from the perforated plate; springs for movably supporting the movable capacitor plate relative to the perforated plate; and a support structure for supporting the perforated and movable plates, where the movable plate is interconnected to the support structure by the springs and where the plates, springs and support structure form a unified, monolithic structure. The movable plate, springs and support structure are made from a silicon wafer. The transducer also includes a dielectric fluid in the space between the plates; and equipment for applying an electric field across the plates for producing an output signal representative of the variation in capacitance induced by the variation in space between the plates in response to an acoustic signal.
REFERENCES:
patent: 3838684 (1974-10-01), Manuel et al.
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4628740 (1986-12-01), Ueda et al.
patent: 4776019 (1988-10-01), Miyatake
patent: 4825335 (1989-04-01), Wilner
patent: 4908805 (1990-03-01), Sprenkels et al.
patent: 4922471 (1990-05-01), Kuehnel
Eldred J. W.
The Charles Stark Draper Laboratory Inc.
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