Acidic ion exchange resin as a catalyst to synthesize a novolak

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

430311, 528137, 528482, 210683, 210685, G03F 7004, C08F 600, C02F 142

Patent

active

056655177

ABSTRACT:
The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having consistent molecular weight and a very low level of metal ions, utilizing a solid acid condensation catalyst. A method is also provided for producing photoresist composition having a very low level of metal ions from such novolak resins and for producing semiconductor devices using such photoresist compositions.

REFERENCES:
patent: 2929808 (1960-04-01), Ross et al.
patent: 4033909 (1977-07-01), Papa
patent: 4033910 (1977-07-01), Papa
patent: 4195138 (1980-03-01), Ward
patent: 4250031 (1981-02-01), Uejima et al.
patent: 4452883 (1984-06-01), Frenchik et al.
patent: 4567130 (1986-01-01), Held
patent: 4584261 (1986-04-01), Held
patent: 4636540 (1987-01-01), Warfel
patent: 4721665 (1988-01-01), Dooley et al.
patent: 4747954 (1988-05-01), Vaughn et al.
patent: 4784937 (1988-11-01), Tanaka et al.
patent: 4833067 (1989-05-01), Tanaka et al.
patent: 4914006 (1990-04-01), Kato et al.
patent: 5073622 (1991-12-01), Wojtech et al.
patent: 5116715 (1992-05-01), Roland
patent: 5118787 (1992-06-01), Furuno
patent: 5175078 (1992-12-01), Aoyama et al.
patent: 5212044 (1993-05-01), Liang et al.
patent: 5284930 (1994-02-01), Matsumoto et al.
patent: 5286606 (1994-02-01), Rahman et al.
patent: 5300628 (1994-04-01), Honda
patent: 5346799 (1994-09-01), Jeffries, III et al.
patent: 5350714 (1994-09-01), Trefonas, III et al.
patent: 5378802 (1995-01-01), Honda
patent: 5446125 (1995-08-01), Honda et al.
patent: 5472616 (1995-12-01), Szmanda et al.
patent: 5478691 (1995-12-01), Miyashita et al.
patent: 5500127 (1996-03-01), Carey et al.
patent: 5521052 (1996-05-01), Rahman et al.
patent: 5576139 (1996-11-01), Uenishi et al.
Bayard; "Water Free of Heavy Metals for Medical Use and Ion Exchange Resin Used in its Preparation" Nov. 16, 1992; CA98(26):221589z.
Hirai et al; "Treatment of Waste Waters Containing Formaldehyde and Metals with Chelating Ion Exchange Resins"; Nov. 5, 1975; CA84(14):95328j.
Kimura et al; "Purification of Formaldehyde"; Mar. 9, 1977; CA87(7):52776y.
T. Tanada; "A New Photolithography Tech. with Antireflective . . . "; Journal of the Electrochemical Society, vol. 137, No. 12, pp. 393900-393905; Dec. 1990, Manchester, New Hampshire.
Rohm and Haas Company; "Amberlite Ion Exchange Resins Laboratory Guide"; Sep. 1979; Philadelphia, Pa.
JP-A-1190713 Inatomi, Shigeki et al, Jul. 31, 1989; Chemical Abstracts, vol. 112, No. 18, Apr. 30, 1990, Columbus, OH, p. 17, the Abstract 159201u.
G. Noti et al, "Deionized Water Plants for Semiconductor Device Fabrication", Proceedings of the Inst:Radio and Electron. Eng, Aust.(Australia), vol. 34, No. 2, Mar. 1973, pp. 45-51.
Derwent Publications Ltd., London, GB; JP-A-05 234 876 (OCG Microelectronic Materials), Sep. 10, 1993.
"Rearrangement of Novolak Resins", Rahman et al, SPIE, 1994.
"The Effect of Lewis Bases on the Molecular Weight of Novolak Resins" Rahman et al Ellenville 1994.
"Nature and Degree of Substitution Patterns in Novolaks by Carbon-13 NMR Spectroscopy" Khadim et al SPIE 1993.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Acidic ion exchange resin as a catalyst to synthesize a novolak does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acidic ion exchange resin as a catalyst to synthesize a novolak , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acidic ion exchange resin as a catalyst to synthesize a novolak will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-68555

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.