Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Finishing or perfecting composition or product
Patent
1991-03-25
1994-04-05
Tucker, Philip
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Finishing or perfecting composition or product
430309, 430325, 430329, 252143, G03C 500
Patent
active
H00012998
ABSTRACT:
Disclosed is an aqueous acidic developing solution for a photoresist comprising an acid having from about 1 to 8 carbon atoms, in an effective combination with a solubilizing solvent for the photoresist.
REFERENCES:
patent: 3669660 (1972-06-01), Golda et al.
patent: 3886099 (1975-05-01), Hall
patent: 4271261 (1981-06-01), Shimizu et al.
patent: 4587030 (1986-05-01), Casey
PPG Industries Inc.
Tucker Philip
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