Acid-cleavable radiation-sensitive compounds, positive working r

Details Acid-cleavable radiation-sensitive compounds, positive working r Acid-cleavable radiation-sensitive compounds, positive working r

1992-04-20

1994-09-13

Kight, III, John

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430270, 430176, 430284, 430286, 430292, 430300, 430323, 430326, 430914, 430919, 430925, G03C 173, G03C 1725, G03F 7025, G03F 7027

Patent

active

053468040

ABSTRACT:
A radiation-sensitive mixture which contains compounds of the formula I which generate under irradiation sulfonic acids and are cleavable by the latter ##STR1## in which R.sup.1 is an unsubstituted or substituted alkyl, fluorinated alkyl, perfluoroalkyl or aryl radical,

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