Acetylene compounds as shelf life improvers for photoresist comp

Details Acetylene compounds as shelf life improvers for photoresist comp Acetylene compounds as shelf life improvers for photoresist comp

1985-08-09

1986-12-23

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430270, 430925, 522 30, 522 67, 522 68, 522 69, 522 71, 522184, 522188, G03C 168

Patent

active

046312471

ABSTRACT:
Disclosed are shelf life improvers for photoresist compositions containing organic halides as the photoinitiator that comprise an acetylene compound having the general formula RC.tbd.CR' where R and R' are each independently phenyl, hydrogen, benzyl, vinyl, lower alkyl substituted vinyl, phenyl substituted vinyl, lower alkoxy methyl and phenoxymethyl.

REFERENCES:
patent: 3592798 (1971-07-01), Oswald
patent: 4033773 (1977-07-01), Lewis
patent: 4043887 (1977-08-01), Pacifici et al.
patent: 4113592 (1978-09-01), Rybny et al.

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