Acceleration sensor

Details Acceleration sensor Acceleration sensor

1996-09-25

1998-05-05

Eldred, J. Woodrow

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

367180, 367163, 310329, 310330, 73652, H04R 1700

Patent

active

057485674

ABSTRACT:
An acceleration sensor is based on a semiconductor technique which is suitable for mass production. The resulting acceleration sensor is small in size and high in precision. The acceleration sensor includes a stationary section, an acting section to which a force is applied in response to acceleration, a flexible section through which the stationary section is coupled to the acting section, a plurality of distortion sensing elements coupled to the flexible section, a first weight having a bottomed hole which is gradually smaller in width towards the bottom of the hole, the first weight being coupled to the acting section and a second weight, greater in specific gravity than the first weight, coupled to the bottom of the hole of the first weight.

REFERENCES:
patent: 5415043 (1995-05-01), Zabler
patent: 5571972 (1996-11-01), Okada
patent: 5656778 (1997-08-01), Roszhart
patent: 5679895 (1997-10-01), von Windheim

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