Accelerating electrostatic lens gun for high-speed electron...

Details Accelerating electrostatic lens gun for high-speed electron... Accelerating electrostatic lens gun for high-speed electron...

2006-07-12

2008-12-16

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S306000, C250S492100, C250S3960ML

Reexamination Certificate

active

07465922

ABSTRACT:
One embodiment relates to an electron beam apparatus for inspecting or reviewing a manufactured substrate. The apparatus includes a cathode, an extraction electrode, a lens electrode, an anode, deflectors, electron lenses, and a detector. The extraction voltage is positive relative to the cathode voltage, such that electrons are emitted from the cathode. Advantageously, the lens voltage is positive relative to the extraction voltage, such that electrons are accelerated from the extraction electrode to the lens electrode while the electrons are condensed to form an electron beam. The electron beam is transmitted through an opening of the anode and is controllably deflected to scan it over an area of the surface. The detector detects secondary electrons from the substrate so as to form an image of the scanned area. Other embodiments and features are also disclosed.

REFERENCES:
patent: 6566667 (2003-05-01), Partlo et al.
patent: 6781296 (2004-08-01), Mensinger
patent: 6949752 (2005-09-01), Okura et al.
patent: 7042145 (2006-05-01), Movchan et al.
patent: 7064477 (2006-06-01), Magera et al.
patent: 2005/0001178 (2005-01-01), Parker et al.

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