Abrupt channel doping profile for fermi threshold field...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S404000, C257S407000

Reexamination Certificate

active

11071196

ABSTRACT:
A Fermi threshold voltage FET has Germanium implanted to form a shallow abrupt transition between the semiconductor substrate dopant type, or well dopant type, and a counter doping layer of opposite type closely adjacent the surface of the semiconductor substrate. Germanium is a charge neutral impurity in silicon that significantly reduces the diffusion motion of other impurity dopants, such as As, P, In, and B in the regions of silicon where Ge resides in significant quantities (i.e. greater than 1E19 cm sup3).

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