Abrasive particle, method for producing the same, and method of

Details Abrasive particle, method for producing the same, and method of Abrasive particle, method for producing the same, and method of

1996-05-22

1997-12-16

Jones, Deborah

Abrasive tool making process, material, or composition

With inorganic material

51309, C09C 168

Patent

active

056979924

ABSTRACT:
Disclosed is an abrasive particle having an average particle size of not more than 2 .mu.m and comprising 100 parts by weight of aluminum oxide and/or silicon oxide and 5 to 25 parts by weight of cerium in the form of cerium oxide. A method for producing the same, and a method for planarizing an insulating film on a semiconductor substrate using the abrasive particles are also disclosed.

REFERENCES:
patent: 4331565 (1982-05-01), Schaefer et al.
patent: 5114437 (1992-05-01), Takeuchi et al.
patent: 5264010 (1993-11-01), Brancaleoni et al.
patent: 5429647 (1995-07-01), Larmie
patent: 5445996 (1995-08-01), Kodera et al.
"Effect of Sintering Atmosphere on the Pore-Structure Stability of Cerium-Doped Nanostructured Alumina" by K.N.P. Kumar et al, Materials Research Bulletin, vol. 29, No. 5, pp. 551-558 1994.
"Effect of Cerium Addition on the Thermal Stability of Gamma Alumina Support" by M. Ozawa et al., J. Materials Science Letters 9 (1990) pp. 291-293.
"Thermal Stability and Characterization of .gamma.-Al.sub.2 O.sub.3 Modified with Lanthanum org Cerium" by M. Ozawa et al Journal of Materials Science Letters ( (1990) pp. 709-711.
"Thermal Stability of Ce Added .gamma.-Al.sub.2 O.sub.3 ", by A. Ozawa et al., Powder and Powder Metallurgy, vol. 37 No. 3, pp. 466-473 (1990).

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