Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive...
Patent
1997-01-14
1999-05-11
Yoon, Tae
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
4302811, 430910, 428901, G03C1/805;1/76
Patent
active
059027126
ABSTRACT:
The present invention provides an ablatively photodecomposable polymer having a photoabsorber bound to the polymer (the "ablatively photodecomposable polymer") which does not phase separate, nor does it crystallize. The ablatively photodecomposable polymer provides even ablation, high resolution and in preferred embodiments, can withstand potassium permanganate etchant and ferric chloride etchant. The ablatively photodecomposable polymer is strippable, although it can remain on the substrate if desired. The ablatively photodecomposable polymer comprises a polymer to which a photoabsorber is bound, either covalently or ionically. The present invention is also directed to a process for forming a metal pattern on a substrate employing the ablatively photodecomposable polymer.
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Burns Francis Charles
Fleming William Weathers
Lee Victor Yee-Way
Snyder Randy William
International Business Machines - Corporation
Yoon Tae
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