Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1992-06-16
1994-08-09
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396ML, H01J 3710
Patent
active
053368916
ABSTRACT:
A system for reducing aberration effects in a charged particle beam. The system includes a source of charged particles, such as electrons or ions, and various building blocks for operating on the charged particle beam to generate a desired particle beam pattern. These building blocks can include at least one of a uniform magnetic field component and a uniform electrostatic field component arrangeable in different combinations, enabling coefficients of spherical and chromatic aberration to be canceled out thereby providing a charged particle beam having greatly diminished aberration.
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Anderson Bruce C.
ARCH Development Corporation
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