Abatement system targeting a by-pass effluent stream of a...

Details Abatement system targeting a by-pass effluent stream of a... Abatement system targeting a by-pass effluent stream of a...

2008-01-29

2008-01-29

Lawrence, Frank M. (Department: 1724)

Gas separation: apparatus

Solid sorbent apparatus

Plural diverse separating means

C096S142000

Reexamination Certificate

active

07323042

ABSTRACT:
An apparatus and method for abating toxic and/or hazardous gas species in a diluent gas stream line deriving from a by-pass line of a semiconductor process tool, comprising contacting the diluent gas stream with a dry resin sorbent material having an affinity for the toxic and/or hazardous gas species to effect the removal of at least a portion of the toxic and/or hazardous gas species by a chemisorbent or physisorbent reaction between the sorbent bed and the toxic gas component effectively reduces the concentration of the toxic gas component in the process diluent stream to below TLV.

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Semiconductor Environmental, Safety and Health Association Emerging Technologies Miniconference in Phoenix, AZ, Sep. 19, 2003.

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