Abatement of NF.sub.3 with metal oxalates

Details Abatement of NF.sub.3 with metal oxalates Abatement of NF.sub.3 with metal oxalates

1997-11-17

1999-06-08

Straub, Gary P.

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Nitrogen or nitrogenous component

423235, 4232391, 423489, C01B 2100, C01B 908, C01J 800

Patent

active

059102942

ABSTRACT:
A process for abating NF.sub.3 by contacting it with a metal oxalate or carbonate.

REFERENCES:
patent: 4323544 (1982-04-01), Magder
patent: 4975259 (1990-12-01), Hyakutake et al.
patent: 5183647 (1993-02-01), Harada et al.
patent: 5417934 (1995-05-01), Smith et al.
patent: 5417948 (1995-05-01), Iwata et al.
patent: 5597540 (1997-01-01), Akita et al.
patent: 5800792 (1998-09-01), Ibaraki et al.
patent: 5832746 (1998-11-01), Nagamura
J. Burdeniiuc and R. H. Crabtree, Mineralization of Chlorofluorocarbons and Aromatization of Saturated Fluorocarbons by a Convenient Thermal Process, Science, vol. 271, Jan. 19, 1996, pp. 340-341.

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