3-D structures with smoothly-varying topographical features...

Details 3-D structures with smoothly-varying topographical features... 3-D structures with smoothly-varying topographical features...

2007-12-04

2007-12-04

Walke, Amanda (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S280100, C430S009000

Reexamination Certificate

active

10666198

ABSTRACT:
3-D structures which are fabricated by gray-tone exposure of a class of thick negative photo-sensitized epoxy resists from the substrate side of a transparent substrate, using development methods that rely upon a physical distinction between polymerized (solid) and unpolymerized (liquid) photoresist at elevated temperatures Such structures may exhibit smoothly-varying topographic features with thicknesses as great as 2 mm.

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