4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber
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H
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Habraken Anton

Inventor

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Hancock Shawn D.

Inventor

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Hashizume Yoshinori

Inventor

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Hassanzadel Parriz

Examiner

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Hassanzdeh Parviz

Examiner

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Hersh Michael L.

Inventor

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Higashi Kumiko

Inventor

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Hiroki Tsutomu

Inventor

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Hisamune Yoshiaki

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Hitachi Kokusai Electric Inc

Corporate Assignee

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Hoffman David Eugene

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Hoffmann Josef

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Honeycutt Gary C

Representative

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Hopkins Kerry

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Houchin Ryuzo

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Huet Daniel

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Hulquist Steven J.

Attorney

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Hurukado Tatuhiko

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Huston Joel M.

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Hwang In Ho

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