4. Ventilation
  5. Workstation ventilator
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Precision gas flow control by use of coarse and fine control ele

Ventilation – Workstation ventilator – Covered workbench chamber
Patent

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Pressure gradient control system

Ventilation – Workstation ventilator – Spray booth
Patent

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Process chamber exhaust system

Ventilation – Workstation ventilator
Patent

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Push-pull type ventilation hood

Ventilation – Workstation ventilator – Covered workbench chamber
Reexamination Certificate

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