4. Valves and valve actuation
  5. Fluid actuated or retarded
  6. Flexible wall expansible chamber reciprocating valve actuator
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Nonjamming vacuum valve having tapered plunger

Valves and valve actuation – Fluid actuated or retarded – Flexible wall expansible chamber reciprocating valve actuator
Patent

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Normally double-closed microvalve

Valves and valve actuation – Fluid actuated or retarded – Flexible wall expansible chamber reciprocating valve actuator
Reexamination Certificate

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