Normally double-closed microvalve

Valves and valve actuation – Fluid actuated or retarded – Flexible wall expansible chamber reciprocating valve actuator

Reexamination Certificate

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Details

C251S129060, C417S322000, C417S413300

Reexamination Certificate

active

07631852

ABSTRACT:
A normally closed microvalve includes a fluid inlet, a fluid outlet, a deflectable closing element, which, in the closed state of the microvalve, is seated on a sealing lip, such that the fluid inlet is fluidically disconnected from the fluid outlet, and in the opened state of the microvalve, is spaced apart from the sealing lip, and a deflectable holding structure which is connected to the closing element such that, between the same, a space exists, which is in fluidic communication to the fluid outlet. An influence of a force onto the holding structure and the closing element in a first direction provides an opening-action to the microvalve, while an influence of a force onto the holding structure and the closing element in a second direction provides a closing-action. The fluid inlet and the closing element are arranged such that a pressure at the fluid inlet exerts a force in the second direction. An effective surface of the holding structure, which, when a pressure is applied to the fluid outlet, causes a force in the second direction, is greater than an effective surface of the closing element, which, when a pressure is applied to the fluid outlet, causes a force in the first direction.

REFERENCES:
patent: 4911616 (1990-03-01), Laumann, Jr.
patent: 6227824 (2001-05-01), Stehr
patent: 6390791 (2002-05-01), Maillefer et al.
patent: 6488652 (2002-12-01), Weijand et al.
patent: 6554591 (2003-04-01), Dai et al.
patent: 7025324 (2006-04-01), Slocum et al.
patent: 7032608 (2006-04-01), Koeneman et al.
patent: 2003/0141473 (2003-07-01), Pelrine et al.

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