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Semiconductor wafer temperature measurement system and method

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent

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Sensing device for controlling electromagnetic field generator f

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Sensing system for obtaining images and surface temperatures

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Sensor and disturbance measurement method using the same

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Sensor for measuring a substrate temperature

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Sensor for radiation pyrometric temperature measurement at high

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Sequential thermography fluid flow indicator

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Shielded heat sensor for measuring temperature

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Single-fiber multi-color pyrometry

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Single-fiber multi-color pyrometry

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Spectral discrimination pyrometer

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Spectroscopic method and apparatus for optically measuring tempe

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Substrate temperature measurement by infrared transmission

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Surface condition measurement apparatus

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Surface temperature measuring apparatus for object within furnac

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Surface temperature sensor

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Surface-temperature sensing method and apparatus

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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System and method for determining combustion temperature...

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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System and method for determining combustion temperature...

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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System and method for non-contact temperature sensing

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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