4. Semiconductor device manufacturing: process
  5. Forming schottky junction
  6. Using refractory group metal
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Device improvement by lowering LDD resistance with new...

Semiconductor device manufacturing: process – Forming schottky junction – Using refractory group metal
Reexamination Certificate

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Direct patterning of nanometer-scale silicide structures on...

Semiconductor device manufacturing: process – Forming schottky junction – Using refractory group metal
Reexamination Certificate

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