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High-quality SGOI by annealing near the alloy melting point

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate

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High-voltage device substrate structure and method of fabricatio

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive...
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Hybrid trench isolation technology for high voltage...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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