4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens
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Astigmatism in electron beam probe instruments

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Astigmatism-correction device and charged-particle-beam...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Automated method of correcting aberrations in electron beam,...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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