4. Optics: measuring and testing
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Improved particle sensor and method for assaying a particle

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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In situ particle size measuring device

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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In situ sensor for near wafer particle monitoring in semiconduct

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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In situ small particle diagnostics

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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Instrument for measuring sizes and quantity of particles in flui

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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