4. Optics: measuring and testing
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Microinterferometer for measuring distance with improved...

Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate

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Multi-channel grating interference alignment sensor

Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate

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Multi-conjugate adaptive optics system for field conjugation

Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate

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