Micro-machine electrostatic actuator, method and system...

Micro-machine polarization-state controller

Micro-machined tunable delay line

Micro-mechanical device having anti-stiction layer and...

Micro-mechanical modulator having an improved membrane configura

Micro-mechanical polarization-based modulator

Micro-mechanical polarization-based modulator

Micro-mechanical system employing electrostatic actuator and...

Micro-mechanical, anti-reflection, switched optical modulator ar

Micro-mirror device and driving method

Micro-mirror device and optical pick-up system of the same

Micro-mirror device including dielectrophoretic liquid

Micro-mirror device including dielectrophoretic microemulsion

Micro-mirror element

Micro-mirror element with double binge

Micro-mirrors with flexure springs

Micro-optical analysis system and approach therefor

Micro-optical arrangement

Micro-optics solar energy concentrator

Micro-optoelectromechanical system packages for a light...