Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-12-11
2007-12-11
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C257S680000, C257S687000, C257S706000, C257S723000, C438S104000, C438S107000, C438S123000, C324S1540PB
Reexamination Certificate
active
11029316
ABSTRACT:
A micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package, the secondary package comprising a seal and a second transparent lid; and an optical material disposed between the first transparent lid and the second transparent lid, where the optical material is a solid, gel or liquid. An alternatively micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package; and a desiccant or getter material disposed inside the secondary package with the modulator package.
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Chen Chien-Hua
Craig David M.
Haluzak Charles C.
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