4. Optical: systems and elements
  5. Having significant infrared or ultraviolet property
  6. Having folded optical path
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Diffraction spectral filter for use in extreme-UV...

Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path
Reexamination Certificate

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Diffractive element in extreme-UV lithography condenser

Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path
Patent

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Diffractive element in extreme-UV lithography condenser

Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path
Reexamination Certificate

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