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Imaging system for an extreme ultraviolet (EUV) beam-based...

Optical: systems and elements – Diffraction – From grating
Reexamination Certificate

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Imaging system with large depth of field

Optical: systems and elements – Diffraction – From grating
Reexamination Certificate

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Inputs and outputs for an optical multiplexer/demultiplexer...

Optical: systems and elements – Diffraction – From grating
Reexamination Certificate

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Integrated beam shaper and use thereof

Optical: systems and elements – Diffraction – From zone plate
Patent

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Interferential position measuring device with three detectors

Optical: systems and elements – Diffraction – From grating
Patent

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