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Wafer boat elevator system and method

Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Reexamination Certificate

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Wafer boat support and method for twin tower wafer boat loader

Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Reexamination Certificate

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Wafer handling for a reflow tool

Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Reexamination Certificate

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Wafer transfer device

Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Patent

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Wafer transfer mechanism in vertical CVD diffusion apparatus

Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Patent

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Wide-mouth article unloading

Material or article handling – Chamber of a type utilized for a heating function and...
Patent

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Workpiece charger for heating furnace

Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Patent

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Workpiece manipulator for a hot environment

Material or article handling – Chamber of a type utilized for a heating function and... – With alarm – indicator – or signal
Patent

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