4. Material or article handling
  5. Associated with semiconductor wafer handling
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Method and apparatus for transferring substrate

Material or article handling – Associated with semiconductor wafer handling
Reexamination Certificate

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Method for improving the rate of a plasma enhanced vacuum...

Material or article handling – Associated with semiconductor wafer handling
Reexamination Certificate

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Method for transferring wafers in a semiconductor...

Material or article handling – Associated with semiconductor wafer handling – Includes means for gripping wafer
Reexamination Certificate

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Method of adhering wafer and wafer adhering device

Material or article handling – Associated with semiconductor wafer handling – Including wafer orienting means
Reexamination Certificate

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Modular frame for a wafer fabrication system

Material or article handling – Associated with semiconductor wafer handling – Including wafer charging or discharging means for vacuum...
Reexamination Certificate

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