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Substrate transport apparatus with double substrate holders

Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent

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Substrate transporting apparatus

Material or article handling – Apparatus for charging a load holding or supporting element... – Transporting means is a horizontally rotated arm
Patent

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Substrate treating apparatus

Material or article handling – Apparatus for charging a load holding or supporting element...
Reexamination Certificate

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System and apparatus for use in fabricating small tubular articl

Material or article handling – Apparatus for charging a load holding or supporting element... – Supply source includes chute
Patent

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System for manufacturing semiconductor under clean condition

Material or article handling – Apparatus for charging a load holding or supporting element... – Load holding or supporting element including gripping means
Patent

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System for sending-off press-formed parts

Material or article handling – Apparatus for charging a load holding or supporting element... – Load holding or supporting element including gripping means
Patent

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System for transferring articles between controlled environments

Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent

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