Substrate transport apparatus with double substrate holders

Details Substrate transport apparatus with double substrate holders Substrate transport apparatus with double substrate holders

1999-01-12

2000-12-12

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

294 871, 414937, B65H 500

Patent

active

061589411

ABSTRACT:
A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate holders mounted to the movable arm assembly. The substrate holders each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms. Each pair of driven arms is connected to a separate one of the holders for extending and retracting the holders along a radial path relative to a center of the movable arm assembly.

REFERENCES:
patent: 1190215 (1916-07-01), Becker
patent: 2282608 (1942-05-01), Rempel
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3730595 (1973-05-01), Yakubowski
patent: 3768714 (1973-10-01), Applequist et al.
patent: 3823836 (1974-07-01), Cheney et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 4062463 (1977-12-01), Hillman et al.
patent: 4094722 (1978-06-01), Yamamoto et al.
patent: 4109170 (1978-08-01), Fujita et al.
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4284301 (1981-08-01), Geiger et al.
patent: 4381965 (1983-05-01), Maher, Jr. et al.
patent: 4666366 (1987-05-01), Davis
patent: 4675096 (1987-06-01), Tateishi et al.
patent: 4721971 (1988-01-01), Scott
patent: 4730975 (1988-03-01), Munakata
patent: 4907467 (1990-03-01), Toyoda et al.
patent: 4909701 (1990-03-01), Hardegen et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5046909 (1991-09-01), Murdoch
patent: 5151008 (1992-09-01), Ishida et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5183370 (1993-02-01), Cruz
patent: 5270600 (1993-12-01), Hashimoto
patent: 5333986 (1994-08-01), Mizukami et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5421695 (1995-06-01), Kimura
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5647724 (1997-07-01), Davis, Jr. et al.
patent: 5789878 (1998-08-01), Kroeker et al.
Prospectus for Mattson Technology, Inc., pp. 3 and 20-30, 1995.
Patent Abstracts of Japan, Pub. No. 07227777, Aug. 29, 1995, "Carrier and Processing Device For Article to be Process" JP 06024095, 1 page.

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