4. Heating
  5. Accessory means for holding, shielding or supporting work...
  6. Support structure for heat treating ceramics
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Wafer boat

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer boat for a vertical furnace

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Patent

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Wafer boat with arcuate wafer support arms

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer clamp for a heater assembly

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer holder

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer support tool for heat treatment and heat treatment...

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Wafer support tool for heat treatment and heat treatment...

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Ware support apparatus

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Patent

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